ISO/TS 25138:2025

International Standard   Current Edition · Approved on 20 February 2025

Surface chemical analysis — Analysis of metal oxide films by glow discharge optical emission spectrometry

ISO/TS 25138:2025 Files

English 39 Pages
Current Edition
83.27 BHD

ISO/TS 25138:2025 Scope

This document specifies a glow discharge optical emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

This method is applicable to oxide films 5 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

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