ISO 14644-15:2026
International Standard
Current Edition
·
Approved on
12 May 2026
Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
ISO 14644-15:2026 Files
English
19 Pages
Current Edition
BHD
61.13
ISO 14644-15:2026 Scope
This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644-8).
This document does not apply to the following:
- health and safety requirements;
- compatibility with cleaning agents and techniques;
- cleanability;
- biocontamination;
- specific requirements of equipment and materials for processes and products;
- design details of equipment.
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