BH GSO ISO/TR 19319:2016

ISO/TR 19319:2013

Bahraini Standard Current Edition · Approved on 08 February 2016

Surface chemical analysis -- Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

BH GSO ISO/TR 19319:2016 Files

English 116 Pages

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BH GSO ISO/TR 19319:2016 Scope

This Technical Report describes: a) Functions and their relevance to lateral resolution: 1) Point spread function (PSF) — see 4.1.1 2) Line spread function (LSF) — see 4.1.2 3) Edge spread function (ESF) — see 4.1.3 4) Modulation transfer function (MTF) — see 4.1.4 5) Contrast transfer function (CTF) — see 4.1.5. b) Experimental methods for the determination of lateral resolution and parameters related to lateral resolution: 1) Imaging of a narrow stripe — see 4.2 2) Imaging of a sharp edge — see 4.3 3) Imaging of square-wave gratings — see 4.4. c) Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy — see Clauses 5 and 6.