ISO/TS 22933:2022
International Standard
Current Edition
·
Approved on
01 April 2022
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
ISO/TS 22933:2022 Files
English
15 Pages
Current Edition
45.7 BHD
ISO/TS 22933:2022 Scope
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
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