ISO 18115-3:2022

International Standard   Current Edition
Approved on  30 June 2022

Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis

Chemical analysis
Including analysis of gases and surface chemical analysis

ISO 18115-3:2022 Files

null Pages
Current Edition

ISO 18115-3:2022 Scope

This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

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