ISO 18115-3:2022
International Standard
Current Edition
Approved on
30 June 2022
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
ISO 18115-3:2022 Files
null Pages
Current Edition
ISO 18115-3:2022 Scope
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
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