ISO 17109:2022

International Standard   Current Edition · Approved on 01 March 2022

Surface chemical analysis — Depth profiling — Method for sputter rate determination in X-ray photoelectron spectroscopy, Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films

ISO 17109:2022 Files

English 21 Pages
Current Edition
62.21 BHD

ISO 17109:2022 Scope

This document specifies a method for the calibration of the sputtered depth of a material from a measurement of its sputtering rate under set sputtering conditions using a single- or multi-layer reference sample with layers of the same material as that requiring depth calibration. The method has a typical accuracy in the range of 5 % to 10 % for layers 20 nm to 200 nm thick when sputter depth profiled using AES, XPS and SIMS. The sputtering rate is determined from the layer thickness and the sputtering time between relevant interfaces in the reference sample and this is used with the sputtering time to give the thickness of the sample to be measured. The determined ion sputtering rate can be used for the prediction of ion sputtering rates for a wide range of other materials so that depth scales and sputtering times in those materials can be estimated through tabulated values of sputtering yields and atomic densities.

Best Sellers

GSO 150-2:2013
 
Gulf Standard
Expiration dates for food products - Part 2 : Voluntary expiration dates
BH GSO 150-2:2015
GSO 150-2:2013 
Bahraini Standard
Expiration dates for food products - Part 2 : Voluntary expiration dates
BH GSO 2055-1:2016
GSO 2055-1:2015 
Bahraini Technical Regulation
HALAL FOOD - Part 1 : General Requirements
GSO 2055-1:2015
 
Gulf Technical Regulation
HALAL FOOD - Part 1 : General Requirements

Recently Published

ISO 19970:2025
 
International Standard
Refrigerated hydrocarbon and non-petroleum based liquefied gaseous fuels — Metering of gas as fuel on LNG carriers during cargo transfer operations
ISO 3664:2025
 
International Standard
Graphic technology and photography — Viewing conditions
ISO/IEC 14496-10:2025
 
International Standard
Information technology — Coding of audio-visual objects — Part 10: Advanced video coding
ISO 19361:2025
 
International Standard
Measurement of radioactivity — Determination of beta emitters activities — Test method using liquid scintillation counting